KGD
-
MQ
-
537
Infrared
Gas
Sensor
Product
Introduction
The
KGD
-
MQ
-
537
Infrared
Gas
Sensor
is
based
on
Non-Dispersive
Infrared
(NDIR)
technology.
It
can
accurately
measure
gases
such
as
SiF4,
CF4,
SF6,
NF3,
and
CO2
generated
in
semiconductor
applications.
It
is
compatible
with
common
pre-set
dimensions,
flanges,
and
communication
protocols
within
equipment.
It
can
be
used
for
endpoint
detection
in
semiconductor
deposition
and
cleaning
processes,
as
well
as
terminal
detection
for
chamber
cleaning,
helping
to
reduce
cleaning
time,
cut
costs,
and
increase
production.
Product
Features
-
Utilizes
NDIR
technology,
supports
multi-gas
monitoring
(including
SiF4,
CF4,
SF6,
NF3,
CO2,
etc.)
-
Fast
response
time
and
high
sensitivity
-
No
consumables
-
Analog/digital
communication
-
Modular
design
for
easy
integration
Technical
Parameters
Parameter
|
Details
|
Detection
Principle
|
NDIR
|
Detected
Gases
|
SiF4,
CF4,
SF6,
NF3,
CO2
|
Measuring
Range
|
1
-
264ppm
(0
-
200mTorr)
|
Repeatability
|
±0.5%
|
Linearity
|
±1%F.S.
|
Detection
Limit
|
1ppm
|